METHOD FOR COUNTING PARTICLES

摘要

PURPOSE: A method for counting particles is provided to enhance the reliability in a fabrication process by measuring accurately a variation of particles. CONSTITUTION: The number of particles on a semiconductor substrate is counted before a semiconductor fabrication process is performed. The coordinates of the particles are measured and the measured data are stored as the first data(S22). The number of particles on a semiconductor substrate is counted after the semiconductor fabrication process is performed. The coordinates of the particles are measured and the measured data are stored as the second data(S24). A difference valve between the first data and the second data is determined by comparing the first data to the second data(S26).