WAFER BOAT OF DIFFUSION EQUIPMENT FOR FABRICATING SEMICONDUCTOR DEVICE

摘要

PURPOSE: A wafer boat of diffusion equipment for fabricating a semiconductor device is provided to absorb vibration generated when a wafer boat moves up and down and to control generation of particles by including a quartz plate having a protrusion. CONSTITUTION: A plurality of wafers(W) are prepared for a diffusion process. A protrusion is formed in the end part of the quartz plate(30). Slots(28b) in which the wafers and the quartz plate are to be placed are formed in a support unit at regular intervals. The quartz plate is installed in the lower portion of the plurality of wafers to protect the temperature applied to the plurality of wafers.