发明名称 COMPLEMENTARY METAL OXIDE SEMICONDUCTOR IMAGE SENSOR WITH DUAL MICRO LENS AND FABRICATING METHOD THEREOF
摘要 PURPOSE: A complementary metal oxide semiconductor(CMOS) image sensor with a dual micro lens is provided to avoid a decrease of a detection characteristic at the edge of a pixel array and reduce a cross talk phenomenon between adjacent cells by reducing the effect of tilted light incident upon the edge of the pixel array. CONSTITUTION: Associated devices including photodiodes(22) are formed in a substrate(20). A passivation layer(25) is formed on the substrate. The first micro lens(28) is formed on the passivation layer. A nitride layer(29) is formed along the surface of the first micro lens. The passivation layer and the nitride layer are coated with an over-coating layer. The entire pixel array is covered with the second micro lens(31) formed on the over-coating layer.
申请公布号 KR20040008924(A) 申请公布日期 2004.01.31
申请号 KR20020042662 申请日期 2002.07.19
申请人 HYNIX SEMICONDUCTOR INC. 发明人 LIM, YEON SEOP
分类号 H01L27/146;(IPC1-7):H01L27/146 主分类号 H01L27/146
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