发明名称 SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
摘要 PURPOSE: A semiconductor substrate and a method for manufacturing the same are provided to improve operation speed by enhancing contact area between a bitline contact and a landing plug. CONSTITUTION: A field oxide layer(32) is formed at a semiconductor substrate(31) to define an active region. After forming the first interlayer dielectric(37a) on the resultant structure, a landing plug(38a) is formed to connect the active region through the first interlayer dielectric. After forming the second interlayer dielectric(39) on the resultant structure, a bitline(41) is formed to simultaneously connect the field oxide layer and the landing plug through the second and first interlayer dielectric.
申请公布号 KR20040008658(A) 申请公布日期 2004.01.31
申请号 KR20020042328 申请日期 2002.07.19
申请人 HYNIX SEMICONDUCTOR INC. 发明人 JANG, HEON YONG
分类号 H01L21/283;(IPC1-7):H01L21/283 主分类号 H01L21/283
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