发明名称 METHOD FOR FABRICATING MAGNETIC RAM
摘要 PURPOSE: A method for fabricating a magnetic RAM is provided to improve characteristics and reliability of the device by controlling the amount of added impurity and controlling electrical conductivity. CONSTITUTION: According to the method for fabricating a magnetic RAM, a magnetic pinned layer(35) is formed on an upper part of a connection layer(33). A tunnel barrier layer(37) is formed on an upper part of the magnetic pinned layer with a semiconductor thin film which is thin film of intrinsic semiconductor. And a MTJ(Magnetic Tunnel Junction) cell is formed with a process of forming a magnetic free layer(39) on an upper part of the tunnel barrier layer.
申请公布号 KR20040008422(A) 申请公布日期 2004.01.31
申请号 KR20020042059 申请日期 2002.07.18
申请人 HYNIX SEMICONDUCTOR INC. 发明人 LEE, SEUNG SEOK
分类号 H01L27/105;G11C11/15;H01L21/00;H01L21/8246;H01L43/08;(IPC1-7):G11C11/15 主分类号 H01L27/105
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