发明名称 MIXER FOR HEAT COMPENSATOR OF SEMICONDUCTOR DEVICE TEST HANDLER
摘要 PURPOSE: A mixer for heat compensator of a semiconductor device test handler is provided to inject the mixed cooling fluid of the constant density to the semiconductor device by mixing uniformly the liquefied nitrogen with the dry air. CONSTITUTION: A mixer for heat compensator of a semiconductor device test handler includes a dry air induction tube(32), a liquefied nitrogen induction tube(33), and a liquefied nitrogen discharge hole(34). The dry air induction tube(32) is used for transferring the dry air. The liquefied nitrogen induction tube(33) is connected to one side of the dry air induction tube. An end portion of the liquefied nitrogen induction tube is located in the inside of the dry air induction tube(32). The liquefied nitrogen discharge hole(34) is connected to a rear portion of an end of the liquefied nitrogen induction tube(33).
申请公布号 KR20040009665(A) 申请公布日期 2004.01.31
申请号 KR20020043679 申请日期 2002.07.24
申请人 MIRAE CORPORATION 发明人 HAM, CHEOL HO;HWANG, UI SEONG;LEE, EUNG RYONG;LIM, U YEONG
分类号 H01L21/02;(IPC1-7):H01L21/02 主分类号 H01L21/02
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