ORGANIC MATERIAL DEPOSITING METHOD AND APPARATUS

摘要

PURPOSE: A method for vapor depositing organic materials such as organic compound, organometallic compound and polymer that are emitting materials for organic light emitting device of display device is provided, and a deposition apparatus to which the method is applied is provided. CONSTITUTION: The apparatus comprises a deposition chamber(108) at one side of which exhaust part is installed; a substrate holder(102) which is installed inside the deposition chamber so that a substrate(101) that is a deposition target of organic materials and a metal mask for masking the substrate are mounted on the substrate holder; a manifold(103) installed oppositely to the substrate to supply organic vapor to the substrate from the outside; an organic vapor generation part(300) installed at the outside of the deposition chamber to generate the organic vapor; a vapor transfer part(400) for transferring vapor to the manifold from the vapor generation part; and a carrier gas supply part(500) for supplying carrier gas to the vapor generation part.