| 摘要 |
PURPOSE: A metal alkoxide compound and a preparation method are provided. The compound has high solubility to general solvent such as THF, and is thus less sensitive to water, useful as a precursor for preparing an oxide thin layer containing titanium oxide, and useful as raw material of metal organic deposition(MOD). CONSTITUTION: A metal alkoxide compound is represented by the formula 1, wherein M is barium, strontium or titanium; X1 and X2 are independently RO(CH2)nO-, (RO(CH2)n)2N-, RO(CH2)nNH-, R2N- or RO-; R is C1-C4 alkyl; Y is hydrogen or C1-C4 alkyl; l is 2 or 4; m is an integer of 1 to 3; and n is 2 or 3. A method for preparing the metal alkoxide compound of the formula 1 comprises reacting barium, strontium or titanium metal precursor with an alcohol ligand compound of the formula: X¬1-(CH2)mCH(OH)(CH2)m-X¬2, wherein the titanium metal precursor is tetrachlorotitanium(IV).
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