| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing infrared detecting element which can form an external electrode portion without increase in the manufacturing processes and causing a defect in semiconductor substrate or the like and also provide an infrared detecting element and an ear type clinical thermometer including the infrared detecting element. SOLUTION: The method of manufacturing infrared detecting element comprises a thermopile forming process to form thermopile 12 by forming and connecting in series a plurality of thermocouples 14 having hot contacts 17 and cold contacts 18 on a semiconductor substrate 2, a thin film forming process to form a thin semiconductor substrate, and an external electrode forming process to form an external electrode portion 41 for connecting the thermopile and the external side. In this method, after the external electrode portion is formed in the external electrode forming process, a thin film portion 4 is formed in the etching process. For this etching process, the solution obtained by adding ammonium peroxodisulfate to the solution where silicon is dissolved to the aqueous solution of tetramethylammonium hydroxide is used as the etchant. COPYRIGHT: (C)2004,JPO
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