SEMICONDUCTOR EQUIPMENT AND DIAGNOSIS EQUIPMENT THEREFOR, AND OPERATING SYSTEM OF THE SEMICONDUCTOR EQUIPMENT

摘要

PROBLEM TO BE SOLVED: To provide semiconductor equipment where a user can determine conditions of the equipment or causes of malfunction accurately in a short time. SOLUTION: The semiconductor equipment has a main body that processes materials to form the semiconductor; recording means that record operation data of the main body as predetermined data; and display means that are located at a remote point from the main body, and displays simulated results of arithmetic means that compute and simulate the operation of the main body using the data. COPYRIGHT: (C)2004,JPO