| 摘要 |
PROBLEM TO BE SOLVED: To make it possible to measure and analyze low coherent interference fringes at high speed by representing the intensity distribution of the low coherent interference pattern by an intensity distribution function using an envelope function, calculating an unknown quantity of the light intensity distribution funciton based on the light intensity of each shift level shifting the phase, and determining a peak position of an envelope curve on the basis of the result of the calculation. SOLUTION: The light intensity distribution of the interference fringe is represented by the envelope function (S1). The phase is shifted and the light intensity is measured at every shift level (S3). The unknown quantity of the light intensity distribution function is calculated based on the measured light intensity of each shift level (S4). The peak position of the envelope curve is determined on the basis of the result of the calculated unknown quantity (S5). The height of a specimen surface is determined based on the peak position. COPYRIGHT: (C)2004,JPO
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