| 摘要 |
PROBLEM TO BE SOLVED: To provide a carrying device with casters for carriage directly inside and outside a clean room. SOLUTION: The carrying device comprises a gas tank 26 storing high pressure gas in a sealed manner, a mechanical valve 23 for parting gas supplied from the gas tank 26 into two gas supply passages, and a gas cylinder 18 connected with the two gas supply passages parted by the mechanical valve 23. A piston of the gas cylinder 18 sustains its set-in/out condition with the operation of the mechanical valve 23. COPYRIGHT: (C)2004,JPO
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