FLUID FLOW MEASURING AND PROPORTIONAL FLUID FLOW CONTROL DEVICE
摘要
The present invention provides restrictive-flow flow measurement devices, valve improvements and signal control devices and processes that control the flow of liquids, including control processes for single-liquid calibration.
申请公布号
WO2004010086(A2)
申请公布日期
2004.01.29
申请号
WO2003US22533
申请日期
2003.07.18
申请人
MYKROLIS CORPORATION;WARGO, CHRISTOPHER;NIERMEYER, KARL, J.;SHYU, JIEH-HWA;BRODEUR, CRAIG, L.;BASSER, WILLIAM
发明人
WARGO, CHRISTOPHER;NIERMEYER, KARL, J.;SHYU, JIEH-HWA;BRODEUR, CRAIG, L.;BASSER, WILLIAM
