| 摘要 |
PROBLEM TO BE SOLVED: To provide a multilayered substrate with high reliability and manufacturability for preventing a multilayered substrate of glass ceramic with low strength from easily cracking in handling during an intermediate process. SOLUTION: A green sheet with the diameters and the widths of a slit and a round hole expanded in stages is laminated along the dividing line of the multilayered substrate when laminating a green sheet. Then the end surface of the multilayered substrate after dividing is a stepped structure. COPYRIGHT: (C)2004,JPO |
