METHOD AND DEVICE FOR DETECTING WAFER TEMPERATURE

摘要

PROBLEM TO BE SOLVED: To provide a detection device of a wafer temperature for easily and precisely managing the temperature of the wafer. SOLUTION: The wafer 6 placed on a susceptor 5 is sucked to a susceptor 5-side with electrostatic suction force by application of output voltage of a variable DC power source 22. A temperature characteristic obtained by detecting the temperature of the wafer 6 against the respective output voltages by changing the output voltages of the variable DC power source 22, while the temperature of the wafer 6 is measured is stored in a temperature characteristic storage part 21. A voltage detector 23 detects the output voltages of the variable DC power source 22. A voltage signal being an output signal of the voltage detector 23 is inputted to the temperature characteristic storage part 21 and the temperature of the wafer 6 is specified based on the temperature characteristic. COPYRIGHT: (C)2004,JPO