| 摘要 |
PROBLEM TO BE SOLVED: To prevent processing liquid to be recovered from mixing into another recovery tank when recovering the processing liquid after processing a substrate. SOLUTION: The device has a plurality of recovery tanks 16-19, which are provided so that processing liquids splashed from a substrate 11 to be processed are recovered every kind thereof with a rotating means 15, by rotating the substrate 11 held with a substrate chuck portion 13 to feed a plurality of processing liquids onto the substrate 11. When recovering one processing liquid with one recovery tank, the activation of a lifting mechanism 28 to recover with only the inlet of the recovery tank prevents the processing liquid to be processed from being not mixed into the other recovery tanks. COPYRIGHT: (C)2004,JPO
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