| 摘要 |
PROBLEM TO BE SOLVED: To provide a workpiece processing apparatus for surely and easily detecting abnormality of a processed workpiece without an influence from background noise. SOLUTION: The workpiece processing apparatus 30 is provided with a processing chamber 11 for processing the workpiece W, a workpiece support means 12 disposed in the processing chamber 11 and supporting the workpiece W, an acoustoelectric conversion element 13 disposed outside the processing chamber 11, receiving a sound wave and converting it into an electrical signal, a sound wave transmission means 31 for transmitting the sound wave generated in the processing chamber 11 to the acoustoelectric conversion element 13 and an abnormality detection means 15 for detecting the abnormality of the workpiece W based on an output signal from the acoustoelectric conversion element 17. The sound wave transmission means 31 noncontactly penetrates a wall 11a of the processing chamber 11 through a sound wave attenuation member 10. One end of the sound wave transmission means 31 contacts the workpiece W or the workpiece support means 12 in the processing chamber 11. The other end is connected to the acoustoelectric conversion element 13 outside the processing chamber 11. COPYRIGHT: (C)2004,JPO
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