CLEANING APPARATUS USING SUPERCRITICAL OR SUBCRITICAL FLUID

摘要

PROBLEM TO BE SOLVED: To provide a cleaning apparatus using a supercritical or subcritical fluid for cleaning a minute glass fiber efficiently by using the supercritical fluid without damage so that released stains are not stuck again. SOLUTION: This cleaning apparatus is provided with a cleaning tank 16 for cleaning the object to be cleaned by using the supercritical or subcritical fluid and a controller 26 for controlling so that the fluid to be made to flow into the tank 16 is made to keep the supercritical or subcritical state by raising the temperature and pressure gradually, the fluid keeping the supercritical or subcritical state is circulated in the tank 16 and the fluid is discharged from the tank 16 while reducing the pressure of the fluid circulated in the tank 16 and/or lowering the temperature gradually. COPYRIGHT: (C)2004,JPO