发明名称 CARBON COMPOSITE MATERIAL
摘要 <p>A carbon composite material having a carbon substrate and, formed on the surface thereof, a tantalum carbide layer, characterized in that in the X-ray diffraction pattern of the crystal constituting the tantalum carbide layer, the ratio of the intensity of the peak corresponding to the (200) face to that of the peak corresponding to the (111) face: I(200)/I(111) is 0.2 to 0.5, or the ratio of the intensity of the peak corresponding to the (111) face to that of the peak corresponding to the (200) face: I(111)/I(200) is 0.2 to 0.5. The carbon composite material is excellent in durability and is free from the occurrence of damages such as cracking and exfoliation resulting from exhaustion or the like even after it is used at a high temperature in an atmosphere of a reducing gas or a reactive gas for a long period of time.</p>
申请公布号 WO2004009515(A1) 申请公布日期 2004.01.29
申请号 WO2003JP08189 申请日期 2003.06.27
申请人 TAKAGI, TAKASHI;IBIDEN CO., LTD.;NORO, TADASHI 发明人 TAKAGI, TAKASHI;NORO, TADASHI
分类号 C04B41/50;C04B41/87;C23C16/32;H01L21/205;(IPC1-7):C04B41/87;C04B35/36 主分类号 C04B41/50
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