| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a photoelectric encoder that can be improved in measurement performance. <P>SOLUTION: In the light receiving array 9 of this photoelectric encoder 1, photodiodes 91 are arranged in an array-like state and a plurality of light shielding films 99 are arranged on the backside of the photodiodes 91 when the films 99 are viewed from a scale 7 side. In addition, a light passing section 90 is formed between adjacent light shielding films 99. Of the light projected upon the optical grating 75 of the scale 7, the light passing through the space between adjacent photodiodes 91 is converged through a lens 95. The converged light is guided to the backside of the light shielding films 99 through the light passing section 90. <P>COPYRIGHT: (C)2004,JPO</p> |
