OPTICAL ELEMENT RETAINING MECHANISM, OPTICAL SYSTEM LENS-BARREL AND ALIGNER

摘要

PROBLEM TO BE SOLVED: To provide an optical element retaining mechanism or the like, which restrains the deformation of an optical element, in a precise optical instrument such as a semiconductor device aligner or the like. SOLUTION: A mirror 1 (the optical element) in an optical system lens-barrel is retained by three sets of retaining member sets 10. These retaining member sets 10 are arranged so as to be distributed by 120°around the side peripheral surface of the mirror 1. The retaining member set 10 is provided with a connecting member 18 connected to a ring. The inside of the connecting member 18 is provided with a bonding member 16 bonded to the side peripheral surface of the mirror 1 through an adhesive 17, and two sheets of leaf springs 11 extended from the bonding member 16 into both of the peripheral directions of the mirror 1. The leaf spring 11 is constituted of two sheets of spring pieces 12 connected in series while pinching a rigid piece 13. The leaf spring 11 is readily deformed in the radial direction of the mirror 1. Accordingly, the uneven local deformation of the mirror 1 is minimized. COPYRIGHT: (C)2004,JPO