发明名称 CRYSTAL GROWTH APPARATUS
摘要 PROBLEM TO BE SOLVED: To provide a crystal growth apparatus which is capable of clearly observing a diffraction image formed on a phosphor screen for a long period of time. SOLUTION: The crystal growth apparatus is equipped with an RHEED device which makes electrons impinge on a crystal substrate 14 and enables the electrons reflected from the crystal surface of the crystal substrate 14 to impinge on the phosphor screen 1a. The phosphor screen 1a is set movable so as to enable the electrons, which are reflected from the crystal surface of the crystal substrate 14 and then impinge on the first region 20a of the phosphor screen 1a, to impinge on the second region 20b of the phosphor screen 1a. COPYRIGHT: (C)2004,JPO
申请公布号 JP2004031764(A) 申请公布日期 2004.01.29
申请号 JP20020187660 申请日期 2002.06.27
申请人 SUMITOMO ELECTRIC IND LTD 发明人 NAKANISHI FUMITAKE
分类号 C30B23/08;H01L21/203;H01L21/205;(IPC1-7):H01L21/205 主分类号 C30B23/08
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