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发明名称
FÖRDERSYSTEM MIT INTEGRIERTEM FÖRDERTRÄGER UND AUSRICHTER
摘要
申请公布号
DE60007271(D1)
申请公布日期
2004.01.29
申请号
DE20006007271
申请日期
2000.08.01
申请人
ASYST TECHNOLOGIES, INC.
发明人
BONORA, C.;GOULD, H.
分类号
B65G43/08;B65G19/02;B65G35/06;B65G37/02;H01L21/677;(IPC1-7):B65G19/02;A61K39/40;B65G37/00
主分类号
B65G43/08
代理机构
代理人
主权项
地址
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