| 摘要 |
PROBLEM TO BE SOLVED: To provide a larger cleaning work area than a blowing port of a cleaning air. SOLUTION: The cleaning work table 120 is provided with an FFU 132 on a ceiling plate 128 via a louver unit 24, where a cleaning air is blown out to the cleaning work area 152 through the blowing port 131. Exhaust ports 154, 156 and 158 are provided in a boundary part among a working surface 138 and side walls 142, 144 and a rear wall 146, to partly flow down the cleaning air to the lower part of a stage plate 136. A pair of current plates 160 and 162 whose lower ends are brought into contact with the side walls 142 and 144 are arranged on both sides of the blowing port 131, separating the side part of the blowing port 131 from the cleaning work area 152. In the cleaning work area 152, an intake port 166 of a circulating duct 164 is made open to return a part of the cleaning air to the FFU 132. COPYRIGHT: (C)2004,JPO |
