| 摘要 |
PROBLEM TO BE SOLVED: To provide a capacitance-type acceleration sensor which is easily produced and facilitates higher sensitivity, and its manufacturing method. SOLUTION: This capacitance-type acceleration sensor is provided with a weight part 21, a pair of support parts 23, 23 which support the weight part 21 through a spring part 22 fixed to one surface side of a support substrate 1 and making the weight 21 displaceable in a specified direction, a comb-shaped fixed electrode part 24 which has a plurality of thin-plate fixed electrodes 24b fixed to the surface side of the support substrate 1 on both sides of the weight part 21 and disposed such that the specified direction is the thickness direction, and a plurality of thin-plate movable electrodes 21a arranged on the weight 21 so as to enter comb grooves 24c formed between the fixed electrode 24b, 24b adjoined one by one and be made displaceable in the specified direction. The weight part 21, the spring part 22, the support part 23, the fixed electrode 24b, the fixed electrode part 24 and the movable electrode 21a are formed by etching a monocrystal silicon substrate fixed to the support substrate 1. COPYRIGHT: (C)2004,JPO |
