| 摘要 |
PROBLEM TO BE SOLVED: To provide a washing method of an ultra-pure water making system which is excellent in washing power especially in the removal capacity of inorganic or organic fine particles, prevents the components in a washing liquid, shortens a washing time and enables quick start-up of the system. SOLUTION: At least a part of the ultra-pure water making system, which comprises an ultra-pure water making apparatus, a use point for ultra-pure water and an ultra-pure water flow channel for connecting the ultra-pure water making apparatus and the use point, is washed with an aqueous solution having a reductive substance dissolved therein. COPYRIGHT: (C)2004,JPO
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