发明名称 METHOD FOR SELECTING FAULTY DIELECTRICS OF A SEMICONDUCTOR COMPONENT
摘要 The invention concerns a method for selecting faulty dielectrics (2) of a semiconductor component (1), in particular faulty transistor gates of a MOS component. Said method consists in producing, during the production process proper of said component (1) and above the already structured dielectrics (2), a control layer (3) for simultaneous electrical contact of said dielectrics; simultaneously verifying the functionality of the dielectrics by applying an electric voltage on the control layer (3), located on the dielectrics (2), and on the substrate (4), located beneath the dielectrics (2) and in eliminating or structuring the control layer (3) to carry on the production process proper of said component (1).
申请公布号 WO03034482(A3) 申请公布日期 2004.01.29
申请号 WO2002DE03781 申请日期 2002.10.07
申请人 ROBERT BOSCH GMBH;LOTTHOLZ, STEFAN 发明人 LOTTHOLZ, STEFAN
分类号 H01L23/544 主分类号 H01L23/544
代理机构 代理人
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