| 摘要 |
<P>PROBLEM TO BE SOLVED: To obtain a positive radiation-sensitive composition having high sensitivity, high resolution, good adhesion to a substrate, and a good affinity for an alkali developing solution. <P>SOLUTION: The positive radiation-sensitive composition comprises (a) a polymer containing a structural unit which becomes alkali-soluble by the action of an acid, a structural unit having a lactone skeleton and a structural unit having a phenolic hydroxyl group, and (b) an acid generator which generates an acid upon irradiation with a radiation. <P>COPYRIGHT: (C)2004,JPO |
