| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a spin-on glass material used for anode bonding of a spacer. <P>SOLUTION: The spin-on glass material used for anode bonding of the spacer comprises tetraethoxysilane of 2.5-5 wt%, methyltriethoxysilane of 3-6 wt%, ethanol of 60-80 wt%, an alkali metal ion-containing acetic acid solution of 15-25 wt%, and an acetic acid solution of 0.1-2 wt%. The alkali metal element in the alkali metal ion-containing acetic acid solution is 5-60 wt% of the alkali metal ion-containing acetic acid solution. The spin-on glass material has a pH value in the range of 4-6. <P>COPYRIGHT: (C)2004,JPO</p> |
