| 摘要 |
PROBLEM TO BE SOLVED: To perform precise positioning by providing a compensating mechanism which prevents an offset current from flowing to the coil of an electromagnet for driving a moving body for a moving body mechanism such as an exposure device. SOLUTION: This invention relates to the moving body mechanism including the electromagnet having the coil for driving the moving body and an amplifier which supplies a current to the coil. A first control mechanism which feedback-controls the electromagnet on the basis of command information input to an input portion sets the current supplied from the amplifier to the coil to 0 when the command information represents 0. COPYRIGHT: (C)2004,JPO
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