| 摘要 |
PROBLEM TO BE SOLVED: To easily, surely, and stably peel a carrier film from a ceramic green sheet. SOLUTION: A ceramic green sheet 2 is peeled from a mother sheet 3 by the ceramic green sheet peeling method. In a sucking process, a head 6h abuts with a portion which is to be peeled of the mother sheet 3 so placed on a table 5h that the carrier film 1 faces downward, for sucking and holding. In a head separation process, the table 5h fixes the carrier film 1 by two regions sandwiching the portion to be peeled of the mother sheet 3, and inside the region sandwiched between the two regions, the head 6h detaches from the table 5h while sucking and holding the portion to be peeled, with the carrier film 1 not fixed. COPYRIGHT: (C)2004,JPO
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