TEMPERATURE CONTROL DEVICE FOR CONDUCTIVE MATERIAL

摘要

PROBLEM TO BE SOLVED: To provide a temperature control device for a conductive material, which has high heat efficiency and can easily control the temperature. SOLUTION: Power of a constant frequency supplied from a high-frequency power source 10 is supplied to the conductive material 80 through an impedance matching means 20. A directional coupling means 21 detects at least reflected power (Pref). An impedance adjusting means 23 adjusts the impedance matching means 20 in such a manner that the reflected power detected becomes low. An impedance detecting means 22 detects a physical quantity of the conductive material 80 connected to the impedance matching means 20, related to impedance corresponding to the power of the constant frequency supplied from the high-frequency power source 10. A control means 41 controls an output power adjusting means 11 depending on the basis of a temperature detected on the basis of the physical quantity related to the impedance detected, and a temperature set on the basis of temperature processing information. The output power adjusting means 11 controls the power of the designated frequency supplied from the high-frequency power source 10. COPYRIGHT: (C)2004,JPO