| 摘要 |
PROBLEM TO BE SOLVED: To provide a carbon film of high hardness and excellent water repellency, and a method for manufacturing the same. SOLUTION: Gaseous mixture containing methane gas and carbon tetrafluoride gas is introduced from a gas inlet 6 into a vacuum vessel 1 set to a predetermined degree of vacuum. Ion beams 7 are formed by accelerating ions ionized and generated by an ion source 5 at a predetermined voltage, and a base material 2 is irradiated with the ion beams to deposit a carbon film containing fluorine atoms. COPYRIGHT: (C)2004,JPO
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