| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical MEMS element capable of maintaining light reflecting effects by suppressing corrosion on an electrode surface as a light reflecting surface, and to provide a manufacturing method of the element. SOLUTION: A sacrificial layer 21 is patterned so as to be laminated on a lower electrode 12 on a substrate 10. An insulating film 22 is deposited on the substrate 10 so as to cover the lower electrode 12 and the sacrificial layer 21, then, by patterning the insulating film 22 like a belt from below to above the sacrificial layer 21, a bridge type structural body 14 is formed. Next, a metallic film 23 of Al, etc., is deposited, and this surface is nitrided so as to be covered with a nitride film 30. Next, by patterning the metallic film 23 covered with the nitride film 30, an upper electrode 15 to be laminated on the structural body 14 is formed. Thereafter, by removing the sacrificial layer 21, a gap (a) is formed between the lower electrode 12 and the structural body 14. COPYRIGHT: (C)2004,JPO
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