| 摘要 |
PROBLEM TO BE SOLVED: To form a segment electrode and a common electrode from a common conductive layer formed on only two faces of a tip face and a surface. SOLUTION: In a region for forming a driving piezoelectric vibrator 9, an individual inner electrode 18 exposing only on the side of the tip face and a common inner electrode 17 exposing only on the side of a rear end face are laminated with a piezoelectric material therebetween. In a region for forming a dummy piezoelectric vibrator 16, the identical electrodes 21 exposing on the tip face and the rear end face are laminated with a piezoelectric material therebetween to form a piezoelectric material plate having formed thereon a conductive layer 23(22) extended from the tip face to a non-vibrating region. The non-vibrating region is fixed to a fixed substrate 15 and a continuous region is left to the rear end side of the common inner electrode 17. In a region for forming a driving piezoelectric vibrator 9, the conductive layer 23(22) is divided in a comb shape by slits 37 which can be mutually separated to form the dummy piezoelectric vibrator 16, the driving piezoelectric vibrator 9, the common electrode 23 and the segment electrode 22. COPYRIGHT: (C)2004,JPO
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