| 摘要 |
PROBLEM TO BE SOLVED: To suppress characteristic variations of an optical switch 1 to be small. SOLUTION: Nearly V-shaped optical waveguides L1 and L2 are formed in a movable part 8 floating above a substrate 2, besides, nearly V-shaped optical waveguides L3 and L4 are respectively formed in a fixed part 7 fixed on the substrate 2, and four optical waveguides L1 to L4 are formed to a nealy X-shape. Driving fixed parts 6a and 6b are formed on the fixed part 7 side closer than the movable part 8. When the optical waveguides L1 and L2 on the movable part 8 side are connected to the optical waveguides L3 and L4 on the fixed part 7 side in accordance with the shift of the movable part 8 by an electrostatic attraction force between the movable part 8 and the fixed parts 6a and 6b, the optical waveguides L1 and L4 are optically connected, and also, the optical waveguides L2 and L3 are optically connected. When the movable part 8 is separated from the fixed part 7, the optical waveguides L1 and L2 on the movable part 8 side optically connect each other and the L3 and L4 on the fixed part 7 side optically connect each other in accordance with the reflection by the end face of the optical waveguide and the interface of a gap. Since the optical switch can be manufactured by utilizing MEMS technology of high processing accuracy, the characteristic variations can be suppressed. COPYRIGHT: (C)2004,JPO |
