| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrostatic chuck for attracting and firmly holding insulating objects, such as liquid glass, SOS (silicon on sapphire), or SOI (silicon on insulator). SOLUTION: The electrostatic chuck 1 comprises electrostatic electrodes 2 formed on one of the main surfaces of its insulating substrate 3, and feeding terminals 6 formed on the other main surface for energizing the electrostatic electrodes 2. COPYRIGHT: (C)2004,JPO |
