| 摘要 |
PROBLEM TO BE SOLVED: To clean an object to be cleaned without damaging the micro structure of the object. SOLUTION: An aerosol generating nozzle 70 is insulated in heat, and a pressure therein is set high, so that the inside of the aerosol generating nozzle gets into a gas-rich state from a liquid-rich state, thus reducing coagulation of aerosol during adiabatic expansion when an aerosol is jetted into a vacuum cleaning chamber 42 from the aerosol generating nozzle. COPYRIGHT: (C)2004,JPO
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