| 摘要 |
PROBLEM TO BE SOLVED: To improve measuring accuracy of a measuring instrument for an apparatus mounted on a vibration-proof table by quickly damping vibration produced on a bench and a vibrationproof frame comprising honeycomb surface plate of the vibrationproof table. SOLUTION: A prescribed-size space is provided in the bench 2 or the vibrationproof frame 7 of the vibrationproof table in the inside or the outside of a part largely displaced by vibration, a viscoelastic body 4 is stored in the space, its one surface is directly or indirectly fixed to the bench 2 or the vibration-proof frame 7, and a damping material 1 having a clearance in which the viscoelastic body 4 is deformable for dissipating the vibration energy, in the outer circumferential surface of the viscoelastic body 4. COPYRIGHT: (C)2004,JPO
|
