MEMS (MICRO ELECTRO-MECHANICAL SYSTEM) ARRAY, ITS MANUFACTURING METHOD, AND MANUFACTURING METHOD OF MEMS DEVICE BASED ON IT

摘要

PROBLEM TO BE SOLVED: To provide a MEMS array capable of being miniaturized and reducing the development time or development cost. SOLUTION: This MEMS array is formed, for example, by integrating a plurality of elements of a resistor 10, a capacitor 20 and a coil 30 and switches 41-44 for connecting each element on a substrate 1 so that each element is optionally connectable. Instead of the transistors 41-44, mechanical switches may be used. The fixing part of ON/OFF of the switches 41-44 of the MEMS array is substituted by short/open of wiring to manufacture a MEMS device. COPYRIGHT: (C)2004,JPO