| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for visual inspection of microcomponents, which is capable of quickly performing an accurate full visual inspection processing by properly correcting errors due to the turbulence of an attitude with one-time imaging, and to provide an apparatus and program therefor. <P>SOLUTION: Six surfaces (A to F surfaces) are imaged at the same time at the point when a square chip 9 passes in an inspection part 33, and the values of LAm to LDm, RAm to RDm, LEFm, θA, θB, θFm, HAm, WBm are measured. Corrections by tilts of irradiation mirrors 39a, 39b are made from the θFm to obtain θF, and a height h and width w are computed on the basis of the values of the θF, HAm, WBm. Then, the values of the LAm to LDm, RAm to RDm, LEFm are corrected by the principle of trigonometric functions on the basis of the values of the h, w, θA, θB, and the values of La to Ld, Ra to Rd, Lef are computed. Consequently, by considering the turbulence of the attitude on the whole, that is, a tilt to an axis line along with the traveling direction of the square chip 9 and rotation around the axis line, true dimensions can be accurately estimated. <P>COPYRIGHT: (C)2004,JPO |
