| 发明名称 |
METHOD AND APPARATUS FOR BLENDING PROCESS MATERIALS |
| 摘要 |
<p>A method and apparatus for blending and supplying process materials. The method and apparatus are particularly applicable to the blending of ultra-high purity chemicals, the blending of abrasive slurries with other chemicals for the polishing of semiconductor wafers, and high-accuracy blending of chemicals.</p> |
| 申请公布号 |
WO2004009224(A1) |
申请公布日期 |
2004.01.29 |
| 申请号 |
WO2003US22610 |
申请日期 |
2003.07.18 |
| 申请人 |
KINETIC SYSTEMS, INC. |
发明人 |
WILMER, JEFF, A.;MCALLISTER, BRIAN, ALAN;SWAN, DANIEL, A.;SITTERUD, DAVID, E. |
| 分类号 |
B01F3/18;B01F15/04;G05D11/13;B01F3/12;B01F5/10;B01F3/00;B01F3/04;B01F3/08;(IPC1-7):B01F3/00 |
主分类号 |
B01F3/18 |
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