发明名称 Growth of a single-crystal region of a III-V compound on a single-crystal silicon substrate
摘要 A method for growing a single-crystal region of a III-V compound on a surface corresponding to a crystallographic plane of a single-crystal silicon substrate, including the steps of growing by epitaxy on the substrate a single-crystal germanium layer; etching in a portion of the thickness of the germanium layer an opening, the bottom of which corresponds to a single surface inclined with respect to the cristallographic plane or to several surfaces inclined with respect to the cristallographic plane; and growing the single-crystal III-V compound on the bottom of the opening.
申请公布号 US2004016395(A1) 申请公布日期 2004.01.29
申请号 US20030614675 申请日期 2003.07.07
申请人 BENSAHEL DANIEL 发明人 BENSAHEL DANIEL
分类号 C30B25/02;C30B25/18;H01L21/20;H01L29/04;(IPC1-7):C30B23/00;C30B25/00;C30B28/12;C30B28/14 主分类号 C30B25/02
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