摘要 |
<P>PROBLEM TO BE SOLVED: To provide a silicon carbide-based electroconductive sintered compact which contains silicon carbide as a main component and exhibits a low volume resistivity stably, and an industrial method for manufacturing the same. <P>SOLUTION: The electroconductive sintered compact is a sintered compact of a composition comprising silicon carbide (S), aluminum oxide (A) and an electroconductive metal (M). The preferable ratios of silicon carbide (S), aluminum oxide (A), and the electroconductive metal (M), each constituting the sintered compact are 98.7-65 wt.%, 0.3-15 wt.%, and 1-20 wt.%, respectively, based on the total amount of the three components. <P>COPYRIGHT: (C)2004,JPO |