| 摘要 |
PROBLEM TO BE SOLVED: To provide an X-ray device generating X ray with a simple structure, high efficiency, small size, and low cost, capable of realizing more precise measurement and restraining an X-ray-irradiated specimen from damage. SOLUTION: A cold cathode source is used for a cathode 2 of an x-ray tube, and a Cu target, for example, is used for an anode 3. X ray is generated by applying a direct-current high voltage between the cathode 2 and the anode 3 by using a high-voltage power source 1. In the above case, the X ray generated by the X-ray tube is detected by an X-ray detector 6, an FET 4 is controlled through a controller 5 depending on the detected result, and the current flowing through the X-ray tube is stabilized. COPYRIGHT: (C)2004,JPO
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