ELECTRON GUN FOR ELECTRON BEAM MACHINING

摘要

PROBLEM TO BE SOLVED: To realize an electron gun for electron beam machining preventing wear/break of a filament due to ion flow generated by an electron beam and unstable output voltage from a high-voltage power source and requiring no consumable part for coping with the ion flow. SOLUTION: A deflection part 13 deflecting the electron beam EB is arranged in a beam formation electrode 12 accelerating an electron emitted from the filament 11 and forming an electric field generating the electron beam EB so that the electron beam EB is protruded on the emission side beyond an opening part. A grounded anode 15 forming the electric field generating the electron beam EB with the beam formation electrode 12 is arranged face to face to the deflection part 13 while putting the electron beam EB between them. In the progress direction of the main flow of ions ionized from the electron beam, a grounded ground metal plate 16 is arranged. COPYRIGHT: (C)2004,JPO