摘要 |
A metal wiring layer, a plurality of metal plugs, a metal wiring layer, a plurality of metal plugs, a metal wiring layer, a plurality of metal plugs and a metal wiring layer are provided so as to surround a space located in the direction perpendicular to a main surface of a semiconductor substrate of a photoelectric conversion element. These metal parts form a light path. The light path reflects incident light which is entered from outside, thereby preventing the incident light from leaking to other photoelectric conversion elements. Therefore, it is possible to obtain a charge coupled device in which the disadvantage of color dispersion and color blurring between pixels adjacent to each other is suppressed.
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