发明名称 VAPORIZER DELIVERY AMPOULE
摘要 A vaporizer delivery system for use in semiconductor manufacturing processes including a plurality of vertically stacked containers for holding a vaporizable source material. Each of the vertically stacked containers includes a plurality of vented protuberances extending into the interior of the each stacked container thereby providing channels for passage of a carrier gas between adjacent vertically stacked containers.
申请公布号 WO2004010463(A2) 申请公布日期 2004.01.29
申请号 WO2003US20825 申请日期 2003.07.01
申请人 ADVANCED TECHNOLOGY MATERIALS, INC. 发明人 GREGG, JOHN;BATTLE, SCOTT;BANTON, JEFFREY, I.;NAITO, DONN;FUIERER, MARIANNE
分类号 C23C16/448 主分类号 C23C16/448
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