| 摘要 |
PROBLEM TO BE SOLVED: To provide an electron microscope apparatus capable of observing a large size sample without cutting by improving inconvenience caused by a small sample chamber of a conventional electron microscope apparatus. SOLUTION: An electron beam irradiation angle to a sample and a detection angle are made variable by setting a mirror cylinder and a detector on a container on a semicircular ball with a small electron beam generator.By observing the sample in a state that the container is put on the large size sample, observation from the different angle is made possible. COPYRIGHT: (C)2004,JPO
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