X-RAY INSPECTION DEVICE AND X-RAY INSPECTION METHOD

摘要

An X-ray inspection device comprises an X-ray generator (1), a monochromator (2) which receives X-ray from the X-ray generator (1), adjusts its energy density, and emits the X-ray of the predetermined wavelength with a predetermined width, a collimator (3) which receives the X-ray from the monochromator (2) and emits the X-ray in the predetermined direction, an analyzer (4) which inputs the X-ray which is emitted from the collimator (3) and refracted when passing through a work to be inspected, and intensifies the degree of refraction, an X-ray sensor (5) which inputs the X-ray emitted from the analyzer (4) and sensor its intensity, and an image display device (6) which displays the image showing the internal state of the work (A) based on the intensity sensed by the X-ray sensor (5).